专利名称：Wafer carrier, wafer conveying system,
stocker, and method of replacing gas
发明人：Kenji Tokunaga申请号：US10191802申请日：20020710公开号：US07077173B2公开日：20060718
专利附图：
摘要：When atmosphere inside a wafer carrier is replaced by introducing a gas into thewafer carrier from a gas inlet provided to the wafer carrier that can accommodate wafers.At the same time, the atmosphere inside the wafer carrier is sucked to make an inside
pressure negative relative to an outside pressure.
申请人：Kenji Tokunaga
地址：Tokyo JP
国籍：JP
代理机构：Foley & Lardner LLP
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